MOSFETS - Fabrication

MOSFETS - Fabrication Book:

Fabrication: Self-aligned, poly-Si gate process revolutionized Fabrication Self-aligned process minimizes overlap capacitances. S, G, & D defined in one photolithographic step.

Mosfets - Fabrication:

http://www.ecse.rpi.edu/~schubert/Course-ECSE-6290 SDM-2/1 MOSFET-2 Fabrication.pdf
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